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Add to Marked List 66 of 77 Laser Nanolithography and Pyrolysis of SZ2080 Hybrid for Slowing Light in 3D Photonic Crystals

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dc.contributor.author Gailevicius, Darius
dc.contributor.author Jonusauskas, Linas
dc.contributor.author Sakalauskas, Danas
dc.contributor.author Hayran, Zeki
dc.contributor.author Kurt, Hamza
dc.contributor.author Turduev, Mirbek
dc.contributor.author Sakirazanovas, Simas
dc.contributor.author Juodkazis, Saulius
dc.contributor.author Mizeikis, Vygantas
dc.contributor.author Gadonas, Roaldas
dc.contributor.author Staliunas, Kestutis
dc.contributor.author Malinauskas, Mangirdas
dc.date.accessioned 2019-06-28T06:47:00Z
dc.date.available 2019-06-28T06:47:00Z
dc.date.issued 2017
dc.identifier.isbn 9781510606715
dc.identifier.isbn 9781510606722
dc.identifier.issn 0277-786X
dc.identifier.uri https://doi.org/10.1117/12.2250537
dc.identifier.uri http://hdl.handle.net/20.500.12485/295
dc.description.abstract In this work we explore a possibility to apply ultrafast 3D laser nanolithography in conjunction with pyrolysis to acquire glass-ceramic 3D structures in micro- and nano-scale. Laser fabrication allows for production of initial 3D structures with relatively small (hundreds nm - mu m) feature sizes out of SZ2080 hybrid material. Then, post-fabrication heating at 600 degrees C in Ar atmosphere decomposes organic part of the material leaving the glass-ceramic component of the hybrid. Resulting structures are uniformly shrunk by 40%. This brings us one step closer to fabricating highly efficient slow-light absorbers. en_US
dc.description.sponsorship NATO project European Commissions Seventh Framework Programme Laserlab-Europe IV JRA support BIOAPP en_US
dc.language.iso en en_US
dc.publisher SPIE-INT SOC OPTICAL ENGINEERING, 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA en_US
dc.subject Engineering en_US
dc.subject Optics en_US
dc.subject Physics en_US
dc.title Add to Marked List 66 of 77 Laser Nanolithography and Pyrolysis of SZ2080 Hybrid for Slowing Light in 3D Photonic Crystals en_US
dc.type Other en_US
dc.relation.journal Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X
dc.contributor.authorID 0000-0002-3334-0808
dc.identifier.startpage 1011511
dc.identifier.endpage 1011511
dc.identifier.volume 10115


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