Demirel, Kaan; Yazgan, Erdem; Demir, Simsek; Akin, Tayfun
(SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98225 USA, 2015)
A new cantilever type radio frequency microelectromechanical systems (RF MEMS) shunt capacitive switch design and fabrication is presented. The mechanical, electromechanical, and electromagnetic designs are carried out to ...